PID control jacket heater for maintaining temperature uniformity in piping.
The jacket heater system is a key item for optimizing semiconductor piping.
It is used for preventing the adhesion of by-products inside the piping, heating the supply gas, and heating the exhaust piping, gas supply piping, valves, equipment, and exhaust treatment device piping.
【Features】
- Capable of heating up to high temperatures of 200°C
- The flexible heating element with multi-layer insulation and grounding offers high safety and durability
- No cold spots, excellent temperature uniformity
- A low-dust type designed for clean room applications in semiconductor equipment
- Flexible, detachable, and provides a good fit
- CE marked and UL certified
【Dedicated Temperature Control & Monitoring System】
- Controls and monitors the temperature of each jacket heater via communication functions
- Enhances temperature uniformity with PID control for each jacket
- Abnormalities are recognized immediately
- Capable of monitoring 40 jacket heaters with one unit
- Compact and space-saving
- Reduces temperature control wiring, power supply wiring, and monitoring costs
■ Benefits of Implementation
- Reduction of downtime
- Lower cleaning costs
- Prevention of contact accidents with equipment
- Suppression of by-product scattering, improving the working environment
